Large Stage IC Inspection Microscope
The microscopes is equipped with a large size mechanical stage, smooth movement of ball bearing guides having low coaxial controls for x-y movement. Reflected and transmitted light illuminator for Inspection of large wafer and photomarks in the IC industry. Objectives : M5x-M10x, M20x and M50x. Eye pieces : WF10x and WF 15x.Magnification : 50x to 750x.